Information Of Programmes

INSTITUTE OF SCIENCE / EEM-546 - ELECTRICAL AND ELECTRONICS ENGINEERING (MASTER)

Code: EEM-546

Course Title: SEMICONDUCTOR MATERIAL & DEVICE CHARACTERIZATION TECHNIQUE

Theoretical+Practice: 3+0

ECTS: 6

Year/Semester of Study

1 / Spring Semester

Level of Course

2nd Cycle Degree Programme

Type of Course

Optional

Department

ELECTRICAL AND ELECTRONICS ENGINEERING (MASTER)

Pre-requisities and Co-requisites

None

Mode of Delivery

Face to Face

Teaching Period

14 Weeks

Name of Lecturer

CİHAN ÖNER (cihanoner@nevsehir.edu.tr)

Name of Lecturer(s)

Language of Instruction

Turkish

Work Placement(s)

None

Objectives of the Course

The aim of this course is to learn the techniques required for the characterization of semiconductor materials and devices and to provide knowledge and skills to understand the importance of different material physical properties associated with these techniques.

Learning Outcomes		PO	MME
The students who succeeded in this course:
LO-1	can understand the physical realtionship between the material properties and different type of semiconductor devices’ working principles.	PO-1 Sufficient knowledge in mathematics, science and engineering related to their branches; the ability to apply theoretical and practical knowledge in these areas to model and solve engineering problems. PO-2 The ability to identify, formulate, and solve complex engineering problems; selecting and applying appropriate analysis and modeling methods for this purpose. PO-3 The ability to design a complex system, process, device or product under realistic constraints and conditions to meet specific requirements; the ability to apply modern design methods for this purpose. (Realistic constraints and conditions include such issues as economy, environmental issues, sustainability, manufacturability, ethics, health, safety, social and political issues, according to the nature of design.)	Presentation
LO-2	can comprehend how to characterize semiconductor materials and devices on different aspects.	PO-2 The ability to identify, formulate, and solve complex engineering problems; selecting and applying appropriate analysis and modeling methods for this purpose. PO-5 Ability to design experiments, conduct experiments, collect data, analyze and interpret results for examination of engineering problems.	Presentation
LO-3	can understand the key physical material properties that affect the operating performance of different semiconductor devices and deduce which characterization techniques should be used accordingly.	PO-2 The ability to identify, formulate, and solve complex engineering problems; selecting and applying appropriate analysis and modeling methods for this purpose.	Presentation
PO: Programme Outcomes MME:Method of measurement & Evaluation

Course Contents
Introduction to Semiconductors, Resistivity Analysis, Carrier & Doping Density Analysis, Contact Resistance & Schottky Barrier Analysis, Series Resistance Analysis, Channel Length & Width, and Threshold Voltage Analysis, Defect Analysis, Oxide and Interface Trapped Charge Analysis, Oxide Thickness Analysis, Carrier Lifetime Analysis, Mobility Analysis, Charge-based and Probe Characterization, Optical Characterization, Chemical and Physical Characterization, Reliability and Failure Analysis
Weekly Course Content
Week	Subject	Learning Activities and Teaching Methods
1	Introduction to Semiconductors	Lecture, Q&A, Discussion
2	Resistivity Analysis	Lecture, Q&A, Discussion
3	Carrier and Doping Density Analysis	Lecture, Q&A, Discussion
4	Contact Resistance and Schottky Barrier Analysis	Lecture, Q&A, Discussion
5	Series Resistance, Channel Length and Width, and Threshold Voltage Analysis	Lecture, Q&A, Discussion
6	Defect Analysis	Lecture, Q&A, Discussion
7	Oxide and Interface Trapped Charges, Oxide Thickness Analysis	Lecture, Q&A, Discussion
8	mid-term exam
9	Carrier Lifetime Analysis	Lecture, Q&A, Discussion
10	Mobility Analysis	Lecture, Q&A, Discussion
11	Charge-based and Probe Characterization	Lecture, Q&A, Discussion
12	Optical Characterization	Lecture, Q&A, Discussion
13	Chemical Characterization	Lecture, Q&A, Discussion
14	Physical Characterization	Lecture, Q&A, Discussion
15	Reliability and Failure Analysis	Lecture, Q&A, Discussion
16	final exam
Recommend Course Book / Supplementary Book/Reading
1	1- Semiconductor Material and Device Characterization, 3th Edition, Dieter K. Schroder, John Wiley & Sons, Inc, 2006
2	Katıhal Elektroniği Devre Elemanları, Ben G. Streetman, Palme Yayıncılık, 2014
Required Course instruments and materials
Course Book, laptop

Assessment Methods
Type of Assessment	Week	Hours	Weight(%)
mid-term exam	8	1	40
Other assessment methods
1.Oral Examination
2.Quiz
3.Laboratory exam
4.Presentation
5.Report
6.Workshop
7.Performance Project
8.Term Paper
9.Project
final exam	16	1	60

Student Work Load
Type of Work	Weekly Hours	Number of Weeks	Work Load
Weekly Course Hours (Theoretical+Practice)	3	14	42
Outside Class
a) Reading	3	14	42
b) Search in internet/Library	3	14	42
c) Performance Project			0
d) Prepare a workshop/Presentation/Report	10	2	20
e) Term paper/Project			0
Oral Examination			0
Quiz			0
Laboratory exam			0
Own study for mid-term exam	16	1	16
mid-term exam	1	1	1
Own study for final exam	16	1	16
final exam	1	1	1
			0
			0
Total work load;			180